Lec20p.EquivCktsI - EE 245: Introduction to MEMS Lecture...

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Unformatted text preview: EE 245: Introduction to MEMS Lecture 20: Equivalent Circuits I CTN 11/6/09 Copyright 2009 Regents of the University of California EE C245 : Introduction to MEMS Design LecM 11 C. Nguyen 11/6/08 11-60-50-40-30-20-10 8.7 8.9 9.1 9.3 Frequency [MHz] Transmission [dB] P in =-20dBm In Out V P Sharper roll-off Sharper roll-off Loss Pole Loss Pole Performance : f o =9MHz, BW =20kHz, PBW =0.2% I.L. =2.79dB, Stop. Rej. =51dB 20dB S.F. =1.95, 40dB S.F. =6.45 Performance : f o =9MHz, BW =20kHz, PBW =0.2% I.L. =2.79dB, Stop. Rej. =51dB 20dB S.F. =1.95, 40dB S.F. =6.45 Design : L r =40 m W r =6.5 m h r =2 m L c =3.5 m L b =1.6 m V P =10.47V P =-5dBm R Qi = R Qo =12k [S.-S. Li, Nguyen, FCS05] 3CC 3 /4 Bridged Mechanical Filter [Li, et al ., UFFCS04] EE C245 : Introduction to MEMS Design LecM 11 C. Nguyen 11/6/08 12 Micromechanical Filter Circuit 1/ k r m r c r 1/ k r m r c r 1/ k r m r c r-1/ k s-1/ k s 1/ k s-1/ k s-1/ k s 1/ k s 1/ k b 1/ k b-1/ k b C o C o 1: e...
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This note was uploaded on 10/31/2010 for the course C 218 taught by Professor Clarknguyen during the Fall '09 term at University of California, Berkeley.

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Lec20p.EquivCktsI - EE 245: Introduction to MEMS Lecture...

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