Lec21w.CapacitiveTransducers

Lec21w.CapacitiveTransducers - EE 245: Introduction to MEMS...

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Unformatted text preview: EE 245: Introduction to MEMS Lecture 21: Capacitive Transducers CTN 11/9/09 Copyright 2009 Regents of the University of California Announcements : Lecture schedule for the next 3 weeks: Reading: Senturia, Chpt. 5, Chpt. 6 Lecture Topics: Energy Conserving Transducers Charge Control Voltage Control Parallel-Plate Capacitive Transducers Linearizing Capacitive Actuators Electrical Stiffness Electrostatic Comb-Drive 1st Order Analysis 2nd Order Analysis Monday Tuesday Wednesday Thursday Friday 9 Lecture 5-6:30 241 Cory 10 Lecture 3:30-5 Moffitt 11 15 Lecture 3:30-5 Moffitt 13 16 Discuss 3:30-5 241 Cory 17 18 19 20 23 Lecture 5-6:30 241 Cory 24 Lecture 3:30-5 Moffitt 25 26 27 Last Time : EE 245: Introduction to MEMS Lecture 21: Capacitive Transducers CTN 11/9/09 Copyright 2009 Regents of the University of California EE 245: Introduction to MEMS Lecture 21: Capacitive Transducers CTN 11/9/09 Copyright 2009 Regents of the University of California EE 245: Introduction to MEMS...
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This note was uploaded on 10/31/2010 for the course C 218 taught by Professor Clarknguyen during the Fall '09 term at University of California, Berkeley.

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Lec21w.CapacitiveTransducers - EE 245: Introduction to MEMS...

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