Lec22p.ElectricalStiffness

Lec22p.ElectricalStiffness - EE 245: Introduction to MEMS...

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EE 245: Introduction to MEMS Lecture 22: Electrical Stiffness CTN 11/10/09 Copyright © 2009 Regents of the University of California EE C245 : Introduction to MEMS Design LecM 12 C. Nguyen 11/18/08 26 Voltage-Controllable Center Frequency Gap EE C245 : Introduction to MEMS Design LecM 12 C. Nguyen 11/18/08 30 Excellent Temperature Stability Uncompensated μ resonator 1.7ppm/ o C 100 [Ref: Hafner] Elect.-Stiffness Compensation 0.24ppm/ o C AT-cut Quartz Crystal at Various Cut Angles Top Electrode-to- Resonator Gap × Top Electrode-to- Resonator Gap × Elect. Stiffness: k e ~ 1/ d 3 Ø Elect. Stiffness: k e ~ 1/ d 3 Ø Frequency: f o ~ ( k m - k e ) 0.5 × Frequency: f o ~ ( k m - k e ) 0.5 × Counteracts reduction in frequency due to Young’s modulus temp. dependence Counteracts reduction in frequency due to Young’s modulus temp. dependence Top Metal Electrode Resonator On par with quartz! On par with
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This note was uploaded on 10/31/2010 for the course C 218 taught by Professor Clarknguyen during the Fall '09 term at University of California, Berkeley.

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Lec22p.ElectricalStiffness - EE 245: Introduction to MEMS...

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