Lec22w.ElectricalStiffness

Lec22w.ElectricalStiffness - 17 18 19 20 23 Lecture 5-6:30...

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EE 245: Introduction to MEMS Lecture 22: Electrical Stiffness CTN 11/10/09 Copyright © 2009 Regents of the University of California Announcements : Lecture schedule for the next 3 weeks: Reading: Senturia, Chpt. 5, Chpt. 6 Lecture Topics: ª Energy Conserving Transducers Charge Control Voltage Control ª Parallel-Plate Capacitive Transducers Linearizing Capacitive Actuators Electrical Stiffness ª Electrostatic Comb-Drive 1st Order Analysis 2nd Order Analysis Monday Tuesday Wednesday Thursday Friday 9 Lecture 5-6:30 241 Cory 10 Lecture 3:30-5 Moffitt 11 15 Lecture 3:30-5 Moffitt 13 16 Discuss 3:30-5 241 Cory
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Unformatted text preview: 17 18 19 20 23 Lecture 5-6:30 241 Cory 24 Lecture 3:30-5 Moffitt 25 26 27 Advantages of Electrostatic Actuators : Nonlinear voltage-to-force transfer function Relatively weak compared with other transducers (e.g., piezoelectric), but things get better as dimensions scale EE 245: Introduction to MEMS Lecture 22: Electrical Stiffness CTN 11/10/09 Copyright 2009 Regents of the University of California EE 245: Introduction to MEMS Lecture 22: Electrical Stiffness CTN 11/10/09 Copyright 2009 Regents of the University of California...
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Lec22w.ElectricalStiffness - 17 18 19 20 23 Lecture 5-6:30...

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