Lec24p.EquivCktsII - Holds for the symmetrical case, where...

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EE 245: Introduction to MEMS Lecture 24: Equivalent Circuits II CTN 11/23/09 Copyright © 2009 Regents of the University of California EE C245 : Introduction to MEMS Design LecM 13 C. Nguyen 11/18/08 16 Complete Electrical-Port Equiv. Circuit V 1 V P F d1 d 1 d 2 Electrode 2 Electrode 1 I 1 C 1 C 2 k x m b η e2 :1 c x l x r x C o1 1: e1 C o2 V 2 I 2 + - V 1 I 1 + - V 2 I 2 x m l x = k c x 1 = b r x = 1 1 1 1 d C V x C V o P P e = = 2 2 2 2 d C V x C V o P P e = = Static electrode- to-mass overlap capacitance EE C245 : Introduction to MEMS Design LecM 13 C. Nguyen 11/18/08 21 Condensed Equiv. Circuit (Symmetrical) e :1 c x l x r x C o1 1: e C o2 + - V 1 I 1 + - V 2 I 2 x C x L x R x C o1 C o2 + - V 1 I 1 + - V 2 I 2 2 e x m L = k C e x 2 = 2 e x b R = If η e1 = η e2 , then … where
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Unformatted text preview: Holds for the symmetrical case, where port 1 and port 2 are identical Holds for the symmetrical case, where port 1 and port 2 are identical EE C245 : Introduction to MEMS Design LecM 13 C. Nguyen 11/18/08 22 Phasings of Signals Below : plots of resonance electrical and mechanical signals vs. time, showing the phasings between them V 1 V P F d1 d 1 d 2 I 1 C 1 C 2 k x m b V 2 I 2...
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