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Unformatted text preview: where port 1 and port 2 are identical EE C245 : Introduction to MEMS Design LecM 13 C. Nguyen 11/18/08 22 Phasings of Signals • Below : plots of resonance electrical and mechanical signals vs. time, showing the phasings between them V 1 V P F d1 d 1 d 2 Electrode 2 Electrode 1 I 1 C 1 C 2 k x m b V 2 I 2...
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This note was uploaded on 10/31/2010 for the course C 218 taught by Professor Clarknguyen during the Fall '09 term at Berkeley.
- Fall '09