Lec26w.Gyroscopes

Lec26w.Gyroscopes - •-• Last Time v 1 V P F d1 d 1 d 2...

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EE 245: Introduction to MEMS Lecture 26: Gyroscopes CTN 12/1/09 Copyright © 2009 Regents of the University of California Announcements : HW#7 emailed last week on Thursday AM; it’s now online and due Thursday next week Reading: Senturia, Chpt. 14 Lecture Topics: ª Detection Circuits Velocity Sensing Position Sensing Reading: Senturia, Chpt. 16, Chpt. 21 Lecture Topics: ª Gyroscopes ª Gyro Circuit Modeling ª Minimum Detectable Signal (MDS) Noise Angle Random Walk (ARW) -------------------------------------- Missing Info in HW#7:
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Unformatted text preview: •--------------------------------------• Last Time : v 1 V P F d1 d 1 d 2 Electrode 2 Electrode 1 i 1 C 1 C 2 k m x b EE 245: Introduction to MEMS Lecture 26: Gyroscopes CTN 12/1/09 Copyright © 2009 Regents of the University of California Suspension Beam in Tension Proof Mass Sense Finger-V P EE 245: Introduction to MEMS Lecture 26: Gyroscopes CTN 12/1/09 Copyright © 2009 Regents of the University of California-V P • Go through slide 20 in Module 14 • Go through Module 15, slides 3-12...
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Lec26w.Gyroscopes - •-• Last Time v 1 V P F d1 d 1 d 2...

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