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m-info.ee245.f09.v2 - EE C245 ME C218 INTRODUCTION TO MEMS...

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EE C245 / ME C218 INTRODUCTION TO MEMS DESIGN FALL 2008 INFORMATION ABOUT THE MIDTERM EXAM Extra Office Hours: (in addition to regular office hours) Prof. Nguyen 4-5 p.m. on Friday, Oct. 30 Chih-Ming Lin 10:30-12 noon on Friday, Oct. 30 Date of Exam: Tuesday, Nov. 3, 3:30-5 p.m. (sharp) Place: 103 Moffitt (our regular room) General Information: The exam will be open book and open notes. Bring a calculator to the exam. You will be provided with exam sheets with enough space to put all your work on these sheets. You should show and include all your work on the exam sheets. The exam will consist of a few problems, each with a number of parts. Material to be Covered: Reading in Senturia, class lecture notes, handouts, and homeworks. The exam is meant to in- clude all material covered so far in the class. You might pay more attention to the following areas: 1. Basic MEMS fabrication process modules, including oxidation, film deposition, litho- graphy, etching, ion implantation, and diffusion. You should especially have a good un-
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