243S2008-06 - N.Cheung Sp 2008 EE 243 ADVANCED IC...

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N.Cheung, Sp 2008 EE 243: ADVANCED IC PROCESSING AND LAYOUT Homework Assignment #6 (Due Mar 19 Wed) Problem 1 Printing of small defects Projection printing is used to print small transparent defects of three different shapes but equal areas (0.4 λ /NA × 0.4 λ /NA). Which one of the three defects will have the highest peak intensity ? Explain concisely (with sketches if necessary ) your reasoning. Hint: For defects sizes smaller than the Rayleigh limit ( 0.61 λ NA ), the patterns behaves like a collection of coherent points sources within the transparent area. The intensity on the image plane is just the square of the summation of the electric fields contributed by sources at x i : I (x) = | i E i (x - x i ) | 2 Problem 2 Projection Printed Feature Type Effects: Go to LAVA at http://cuervo.eecs.berkeley.edu/Volcano/ then Applications and then the Pattern and Aberration Interaction. Leave Aberration blank and select Mask and then the upper left icon with a vertical line end. Click on Submit to SPLAT
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