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Unformatted text preview: − − = j j j j j j RESIST FROM Si ρ b) The magnitude of the reflection coefficient seen from within the resist that a bottom antireflection coating (BARC) layer must produce to make the vertical contrast C VERTICAL equal 0.2 is | ρ | = 0.10 . This is found by finding I MAX = 1.5 I MIN , taking the square root, and setting 1+| ρ | = sqrt(I MAX /I MIN ) (1 -| ρ |) Problem 3 Resist Development Simulation: By adjusting the dose (trial and error) a) Dose at 80mJ/cm2 just cleared in about 60s. b) Dose of 144 mJ/cm2 cleared in about 20s. 80 mJ/cm 2 144 mJ/cm 2...
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- Spring '03
- Square number, Resist standing waves, Resist Development Simulation