This preview shows pages 1–2. Sign up to view the full content.
This preview has intentionally blurred sections. Sign up to view the full version.View Full Document
Unformatted text preview: = j j j j j j RESIST FROM Si b) The magnitude of the reflection coefficient seen from within the resist that a bottom antireflection coating (BARC) layer must produce to make the vertical contrast C VERTICAL equal 0.2 is | | = 0.10 . This is found by finding I MAX = 1.5 I MIN , taking the square root, and setting 1+| | = sqrt(I MAX /I MIN ) (1 -| |) Problem 3 Resist Development Simulation: By adjusting the dose (trial and error) a) Dose at 80mJ/cm2 just cleared in about 60s. b) Dose of 144 mJ/cm2 cleared in about 20s. 80 mJ/cm 2 144 mJ/cm 2...
View Full Document
This note was uploaded on 11/02/2010 for the course EECS 243 taught by Professor Ee243 during the Spring '03 term at University of California, Berkeley.
- Spring '03