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Unformatted text preview: April 20, 2010 ECE 4570Lab #3: CV Characterization Of MOS Capacitors (Rev. 1) Spring 2010 Experiments: Capacitance Voltage Measurements of MOS Capacitors General Information: There is 1 experimental setups for this lab at the main probe station. The lab report (completed template) is due by email - 5 pm on April 28. Email to Rick Brown (email@example.com). Preparation: 1. Review C-V behavior of the MOS capacitors. 2. Review the Chapter 8 of your textbook. 4. Review this document carefully and the lab template (to be provided). Goals: 1. Learn how to set up and execute CV measurements on the Agilent E4980A Precision LCR Analyzer instrument controlled by IC-CAP software. 2. Determine MOS parameters by measurement including the oxide capacitance, the flat band voltage and the presence of inversion layer charge. 3. Explore the effects of illumination on the CV curve. 4. Continue to develop good experimental technique and record keeping. Experiment. CV Measurements of MOS Capacitors. A. LCR Meter Connections to Main Probe Station. We will be using one probe station/LCR meter combination. Only two needle probes are connected. The CV probes are labelled SMU3: capacitance meter ground and SMU4: capacitance meter high and are attached to the Agilent E4980A leads....
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