Material properties murx 1 geometric properties x1

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Unformatted text preview: ¥ ¦¢ !    £ ¤¢ § ¨¢ © ¢ ANSYS Verification Manual . ANSYS Release 9.0 . 002114 . © SAS IP, Inc. 1–558  VM238 Figure 238.2 Wheatstone Bridge Arrangement of Piezoresistors  © § ¨ ¡ ¢  © ¥ ¦ £ ¤ Material Properties Elastic properties: E = 165e3 MPa ν = 0.25 Resistivity: ρ = 7.8e-8 TΩµm Piezoresistive stress coefficients: π11 = 6.5e-5 (MPa)-1 Geometric Properties l = 180 µm w = 120 µm a= 100 µm b= 20 µm Loading Supply voltage Vs=5 V Pressure p = 1MPa π12 = -1.1e-5 (MPa)-1 π44 = 138.1e-5 (MPa)-1 Analysis Assumptions and Modeling Notes The resistors areas are modeled using the piezoresistive option of the coupled-field solid PLANE223. The structural part of the beam is modeled using PLANE82. The resistors are connected into a Wheatstone bridge arrangement by coupling the VOLT degrees of freedom on width sides of the resistors. The supply voltage is applied to the master node of the driving electrode. The applied pressure results in a uniform stress Sx...
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