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Unformatted text preview: roperties
a = 2000µm
b = 1000 µm
d = 5 µm Loading
Operating frequency, Ω = 100000 Hz
Velocity, v = 2000(µm)/s
Pressure at edges = 1e5 Pa Analysis Assumptions and Modeling Notes
The problem is modeling the fluid gap region between two rigid, non-deforming surfaces. The pressure of the
fluid entering and exiting the gap creates a damped elastic response which can modeled by a spring-damper
system. The calculations of the stiffness and damping constants are done by summing the pressure distribution
over the area, then taking these force calculations and feeding them into the equations
νz K= FImω
νz where F(im) and F(re) are the “imaginary” and “real” parts of the force calculated from the harmonic analysis.
According to Blech an analytical solution for the damping and squeeze coefficient for a rigid plate moving with
a transverse motion is given by: ANSYS Verification Manual . ANSYS Release 9.0 . 002114 . © SAS IP, Inc. 1–575 VM245
C(Ω) = 64σ(Ω) po A
π6 d Ω K s (Ω) = πd ∑ m = odd n = odd 64σ(Ω) po A
8 ∑ ∑ ∑ m 2 + n2 c 2 σ(Ω)2 (mn)2 (m2 + n2 c 2 )2 + π4 m =...
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This note was uploaded on 12/09/2010 for the course DEPARTMENT E301 taught by Professor Kulasinghe during the Spring '09 term at University of Peradeniya.
- Spring '09
- The Land