The supply voltage is applied to the master node of

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Unformatted text preview: e ground node of the transducer are constrained in both the X and Y directions. It should also be noted that the transducer gap stiffness is much less than the beam stiffness and will not have any effect on the frequency solution. ANSYS Verification Manual . ANSYS Release 9.0 . 002114 . © SAS IP, Inc. 1–550 VM235 ANSYS Verification Manual . ANSYS Release 9.0 . 002114 . © SAS IP, Inc. 1–551 VM235 Results Comparison Target ANSYS Ratio Frequency (mode 1) 351699.332 351673.733 1.000 Frequency (mode 2) 1381162.303 1380767.749 1.000 Frequency (mode 3) 3096816.034 3094885.115 1.001 1–552 ANSYS Verification Manual . ANSYS Release 9.0 . 002114 . © SAS IP, Inc. VM236: Hysteresis Calculation of a Beam Under Electrostatic Load Overview Reference: J. R. Gilbert, G. K. Ananthasuresh, S. D. Senturia, “3D Modeling of Contact Problems and Hysteresis in Coupled Electro-Mechanics”, MEMS, 1996, pp. 127132. Analysis Type(s): TRANS (ANTYPE = 4) Element Type(s): 2-D Electromechanical Transducer...
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This note was uploaded on 12/09/2010 for the course DEPARTMENT E301 taught by Professor Kulasinghe during the Spring '09 term at University of Peradeniya.

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