Wuchap_04a_09fall - Unit 4 Full Factorial Experiments at Two Levels Source Chapter 4(sections 4.1-4.4 4.6-4.12 4.15 • An Epitaxial Layer Growth

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Unformatted text preview: Unit 4: Full Factorial Experiments at Two Levels Source : Chapter 4 (sections 4.1-4.4, 4.6-4.12, 4.15). • An Epitaxial Layer Growth Experiment (Section 4.1). • Basic concepts for 2 k designs (Section 4.2). • Factorial effects and plots (Section 4.3). • Using Regression to Compute Factorial Effects (Section 4.4). • Fundamental principles (Section 4.6). • Comparisons with ”one-factor-at-a-time” approach (Section 4.7). • Normal and Half-normal plots for detecting effect significance (Section 4.8). • Lenth’s Method (Section 4.9). • Nominal-the best problem, quadratic loss function (Section 4.10). • Use of Log Sample Variance for Dispersion Analysis (Section 4.11). • Analysis of Location and Dispersion: Epitaxial Growth Experiment (Section 4.12). • Blocking in 2 k design (Section 4.15). 1 Epitaxial Layer Growth Experiment • An AT&T experiment based on 2 4 design; four factors each at two levels. There are 6 replicates for each of the 16 (=2 4 ) level combinations; data given on the next page. Table 1: Factors and Levels, Adapted Epitaxial Layer Growth Experiment Level Factor − + A . susceptor-rotation method continuous oscillating B . nozzle position 2 6 C . deposition temperature ( ◦ C) 1210 1220 D . deposition time low high • Objective : Reduce variation of y (=layer thickness) around its target 14.5 μ m by changing factor level combinations. 2 Data from Epitaxial Layer Growth Experiment Table 2: Design Matrix and Thickness Data, Adapted Epitaxial Layer Growth Experiment Factor Run A B C D Thickness ¯ y s 2 ln s 2 1 − − − + 14.506 14.153 14.134 14.339 14.953 15.455 14.59 0.270-1.309 2 − − − − 12.886 12.963 13.669 13.869 14.145 14.007 13.59 0.291-1.234 3 − − + + 13.926 14.052 14.392 14.428 13.568 15.074 14.24 0.268-1.317 4 − − + − 13.758 13.992 14.808 13.554 14.283 13.904 14.05 0.197-1.625 5 − + − + 14.629 13.940 14.466 14.538 15.281 15.046 14.65 0.221-1.510 6 − + − − 14.059 13.989 13.666 14.706 13.863 13.357 13.94 0.205-1.585 7 − + + + 13.800 13.896 14.887 14.902 14.461 14.454 14.40 0.222-1.505 8 − + + − 13.707 13.623 14.210 14.042 14.881 14.378 14.14 0.215-1.537 9 + − − + 15.050 14.361 13.91613....
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This note was uploaded on 12/12/2010 for the course STAT 425 taught by Professor Ma,p during the Fall '08 term at University of Illinois, Urbana Champaign.

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Wuchap_04a_09fall - Unit 4 Full Factorial Experiments at Two Levels Source Chapter 4(sections 4.1-4.4 4.6-4.12 4.15 • An Epitaxial Layer Growth

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