0_MTE_450_550_introduction

0_MTE_450_550_introduction - MTE 450/550 Plasma Processing...

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Department of Metallurgical and Materials Engineering MTE 450/550 Plasma Processing of Thin Films Basics and Applications S. Gupta
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Department of Metallurgical and Materials Engineering Recommended Texts Materials Science of Thin Films by Milton Ohring, Academic Press, 2002. Glow Discharge Processes by Brian Chapman, Wiley and Sons, 1980. Supplemental handouts from Materials Research Corporation’s Thin Film Schools and generated from instructor’s own research work.
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Department of Metallurgical and Materials Engineering Course Description Fundamentals of Thin Film Processing Plasma Deposition and Etch Technology Basics of Plasma Processing Equipment Special Emphasis on Sputtering Tools Thin Film Applications Semiconductors Computer Disk Drives and Media Optical Networks and Displays Medical
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Department of Metallurgical and Materials Engineering MTE 450/500 Section I: Thin Film Fundamentals Chapter 1: Fundamental of Plasmas for Process Development
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0_MTE_450_550_introduction - MTE 450/550 Plasma Processing...

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