1_Plasma Process Fundamentals

1_Plasma Process Fundamentals - Department of Metallurgical...

Info iconThis preview shows pages 1–5. Sign up to view the full content.

View Full Document Right Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: Department of Metallurgical and Materials Engineering Review of Plasma Process Fundamentals S. Gupta Associate Professor Dept. of Metallurgical and Materials Engineering The University of Alabama Department of Metallurgical and Materials Engineering Contents Basics of Sputtering DC Glow Discharge Formation of glow discharge Glow and dark space regions Plasma potential Sheath potential Debye screening Maintenance of glow discharge Charge balance Energy balance Ion interactions with target Sputtering target kinetics Ionization potential, sputter yield, mean free path Cathodes RF Diode RF/ DC Magnetron Department of Metallurgical and Materials Engineering Basics of Sputtering The basic set-up must include: A vacuum chamber Two electrodes (cathode and ground) A target attached to the powered electrode (cathode) A substrate attached to the grounded (or floating or biased) electrode. The chamber is evacuated to high vacuum. Argon gas is introduced into the chamber. A potential is applied between the electrodes, ionizing the gas and producing a glow discharge. Positive argon ions bombard the negatively charged target material (cathode). Target material is ejected, atom by atom, and condenses into a film on the substrate. Department of Metallurgical and Materials Engineering DC Glow Discharge When a potential is applied between two electrodes in a vacuum tube, ionizing an inert gas that is introduced, a series of dark and glowing regions are generated: Glow Regions Dark Space Regions Cathode glow Aston dark space Negative glow Cathode dark space Positive column Faraday dark space Anode glow Anode dark space Department of Metallurgical and Materials Engineering...
View Full Document

This note was uploaded on 12/30/2010 for the course MTE 550 taught by Professor S.gupta during the Spring '08 term at Alabama.

Page1 / 20

1_Plasma Process Fundamentals - Department of Metallurgical...

This preview shows document pages 1 - 5. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online