mems final

mems final - PIEZOELECTRIC MICROGENERATOR POWERING THE...

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Click to edit Master subtitle style 1/12/11 PIEZOELECTRIC MICROGENERATOR POWERING THE PACEMAKER Kaushik Illa Satya Prasad Akkina
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1/12/11 Outline Ø Principle used to build micro generator Ø ZnO Nanowires Ø Fabrication of ZnO Nanowires Ø Working of ZnO Nanowires Ø Development of Piezoelectric Potential across the Nanowire Ø Rectification and Amplication Ø ANSYS Analysis Ø Powering the Pacemaker Ø Market Review
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1/12/11 Piezoelectricity Ø Generation of electric field or electric potential in response to mechanical stress is determined as Piezoelectricity. Ø Materials like Quartz, crystals, topaz, having interlocking symmetrical domains are able to generate the electrical potential.
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1/12/11 Zno nanowires Ø Piezoelectric approach is used in converting mechanical energy into electric power with the use of aligned zinc oxide (ZnO) wires. Ø Different Piezoelectric materials like Barium titanate, Aluminum nitride, PZT[Pb1.1(Zr0.3Ti0.7)O3 ] ZnO etc. can be used in the design of micro generator. ZnO nanowires
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1/12/11 Advantages of ZnO Nanowires Ø It exhibits both semiconducting and piezoelectric properties that can form the basis for electromechanically coupled sensors and transducers. Ø ZnO is relatively biosafe and biocompatible , and it can be used for biomedical applications with little toxicity. Ø ZnO exhibits the most diverse and abundant configurations of nanostructures known so far, such as NWs, nanobelts, nanosprings , nanorings, nanobows and nanohelices .
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1/12/11 FABRICATION OF ZnO nanowires Ø The micro reactor is used to grow dense arrays of well- aligned, single crystal ZnO nanowires. Ø Chemical bath deposition (CBD) is widely used to fabricate chalcogenide thin films, deposit oxide and nanowire arrays. Ø In this method, material is deposited onto a substrate from a supersaturated solution of common aqueous precursors such as metal salts, complexing agents, and pH buffers.
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1/12/11 CHEMICAL BATH DECOMPOSITION n CF Microreactor for ZnO nanowire deposition
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1/12/11 EXPERIMENTAL SETUP Ø An AFM is used to mechanically manipulate a single ZnO nanowire. Ø A Ag paste to affix one end of the ZnO wire to a silicon substrate and left the other end free. Ø The substrate used is intrinsic silicon, so its conductivity is poor. A small distance between the wire and the substrate (except at the affixed side) eliminates friction.
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1/12/11 WORKING OF ZnO WIRES Ø
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mems final - PIEZOELECTRIC MICROGENERATOR POWERING THE...

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