Microfabrication

Microfabrication - Click to edit Master subtitle style...

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Unformatted text preview: Click to edit Master subtitle style 1/12/11 Chemical Vapor Deposition by- Shilpa Marti Chandana Palle Murali Daroori Siddharth Vanga 1/12/11 Outline-What is CVD?-Historical perspective-CVD Process and steps-CVD Apparatus-CVD Types-APCVD 1/12/11 Chemical Vapor Deposition n What? CVD is a chemical process which involves deposition of a solid material on a heated surface from a chemical reaction in the vapor phase 1/12/11 Historical Perspective 1950s: Introduction to CVD in semiconductor fabrication and development of CVD Tungsten 1960s: Introduction of plasma CVD in electronics 1970s: Start of industrial use of CVD coated cemented carbides 1980s: Introduction of CVD diamond coatings and metallo-organic CVD 1990s: Development of cluster tools combining CVD and PVD and other processing steps in a single tool for semi conductor fabrication. Present: High thermal conductivity CVD- Diamond film deposition on heat spreaders to dissipate the heat of high intensity integrated circuits. 1/12/11 CVD Process n Chemicals containing atoms and molecules required in the final film are mixed and reacted in the deposition chamber to form a vapor. The atoms or molecules deposit on the wafer surface and build up to form a film 1/12/11 CVD Process n Usually the chemical reaction that takes place fall into four categories Pyrolysis SiH 4 & Si + 2H2 Reduction SiCl4 + 2H2 Si + 4HCl Oxidation SiH4+O2 SiO2 + 2H2 Nitridation 1/12/11 { 3 D 6 8 D D 5 -E A 8 5 -6 2 4 9 -B 7 8 4 -F D 6 D F B 8 9 A 3 1 } Transport of reactants by convection { 3 8 C 5 B C 4 C -E 3 7 4 -2 6 4 0 -B 2 7 A -8 C F 0 5 D F 0 B 7 6 } Transport of reactants by diffusion { 0 B 9 D B 7 F 4 -9 B 8 5 -5 3 4 F -A 5 0 A -4 D D 2 4 7 A 8 9 7 6 } Adsorption of reactants { A C 2 7 2 D C 5 -A 8 1 2 -F 5 4 A -B 0 A 7 -6 5 8 3 7 8 D 7 D A 7 6 } Surface Processes { 9 0 2 D F C 9 B -A 3 7 A -8 A 4 8 -B 5 8 A -F A C 1 8 6 0 C A 4 E } Desorption of byproducts { 8 2 9 D C 0 9 D -1 8 E F -4 E 4 B -A 0 F E -1 6 A D E 9 2 B F B F }...
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This note was uploaded on 01/11/2011 for the course EE 548 taught by Professor Dr.p.c.cheng during the Spring '10 term at SUNY Buffalo.

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