fabfinal deep uv

fabfinal deep uv - Click to edit Master subtitle style By...

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1/12/11 Click to edit Master subtitle style DEEP ULTRA-VIOLET LIGHT SOURCES By Aravind Reddy Gayam Krishna Chaitanya Nutukurthi Nikhil vaddi Prasanthi Annavarapu
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1/12/11 § Ultra-Violet Rays § Types of UV Rays § Deep UV Rays § Deep UV light sources § Use of Deep UV light sources in Fabrication § Photolithography § Alternate Technologies in Fabrication § Deep UV Lasers Contents
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1/12/11 § Type of solar electromagnetic radiation § Wavelength, in the range of 10nm to 400nm, shorter than that of visible light § Energy of the waves varies from 3eV to 124eV, § Is named so as it consists of electromagnetic waves of frequencies higher than those which naked human eye can identify as Violet color, meaning beyond Violet. Ultra-Violet Rays
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1/12/11 § Ultraviolet A rays (UVA) Most of the sun’s natural light 3 Types of UV Rays
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1/12/11 § Deep UV rays refers to wave lengths below 300nm in the UV rays region of the EM spectrum § Deep UV rays mostly used in Photolithography and laser technologies Deep UV Rays (DUV)
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1/12/11 § Natural Sources Deep UV light sources
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1/12/11 § Black Light A lamp that emits long wave UV and small portion of visible light § DUV Fluorescent lamps Produces UVA, UVB or visible light based on the phosphorescent coating § DUV LEDs Use of LED arrays for emission of DUV rays § DUV Lasers Laser Diodes and Solid-State lasers can emit DUV Types of DUV light sources
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1/12/11 DUV light Sources - Figures
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1/12/11 § Used for Photolithography process A device using DUV photo- lithography process can tackle inverse image problems such as mask design § Used along with certain masks and filters for better optical resolution and depth of focus in the design of optical instruments § For patterning and exposure purposes DUV light sources in
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§ A process of transferring geometric shapes from the mask to the surface of silicon wafer. § Steps include wafer cleaning, barrier layer formation, photo resist application, soft baking, mask alignment, exposure and development, and hard baking. § The photo resist that is exposed to deep UV rays are of two types Positive photo resist Negative photo resist § The etching of the resist after exposure depends on the type of the photo resist. Photolithography
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This note was uploaded on 01/11/2011 for the course EE 548 taught by Professor Dr.p.c.cheng during the Spring '10 term at SUNY Buffalo.

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fabfinal deep uv - Click to edit Master subtitle style By...

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