lecture7 - ECE520 VLSI Design Lecture 7: CMOS Manufacturing...

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1 ECE520 – Lecture 7 Slide: 1 University of New Mexico Office: ECE Bldg. 230B Office hours: Tuesday 2:00-3:00PM or by appointment E-mail: payman@ece.unm.edu Payman Zarkesh-Ha ECE520 – VLSI Design Lecture 7: CMOS Manufacturing Process ECE520 – Lecture 7 Slide: 2 University of New Mexico Review of Last Lecture Dynamic Behavior of CMOS Inverter Computing the capacitances Propagation delay model Dynamic power Power due to direct-path current Leakage power Some design techniques
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2 ECE520 – Lecture 7 Slide: 3 University of New Mexico Today’s Lecture CMOS Manufacturing Process Front-end Process Back-end Process (will be covered in “interconnect” lecture) Modern CMOS Process Salisidation Low Doped Drain (LDD) Shallow Trench Isolation (STI) ECE520 – Lecture 7 Slide: 4 University of New Mexico V DD GND A (input) Z (output) N-Well Active & N+ Diffusion Active & P+ Diffusion Poly Contact Metal 1 A (input) Z (output) Inverter Schematic & Layout
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3 ECE520 – Lecture 7 Slide: 5 University of New Mexico FOX (SiO 2 ) N-Well P-Substrate n+ n+ n+ p+ p+ p+ Channel Stop Cross Section of CMOS Inverter ECE520 – Lecture 7 Slide: 6 University of New Mexico Overview of Lithography In order to etch a window opening in a SiO 2 layer on a Si substrate the first step is to spin on a photoresist Photoresist is a light sensitive and acid resistant polymer Positive photoresist is initially insoluble to developing agent and becomes soluble when exposed to UV light Negative photoresist is initially soluble and becomes resistant to the developing agent when exposed to UV light Si-substrate (a) Silicon base material (c) After oxidation and deposition of negative photoresist Photoresist SiO 2 Si-substrate (b) After oxidation SiO 2 Si-substrate
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4 ECE520 – Lecture 7 Slide: 7 University of New Mexico Si-substrate Si-substrate (d) Stepper exposure UV-light Patterned optical mask Exposed resist becomes soluble and will wash away in developing solution SiO 2 Si-substrate Si-substrate SiO 2 SiO 2
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lecture7 - ECE520 VLSI Design Lecture 7: CMOS Manufacturing...

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