lecture8 - ECE520 VLSI Design Lecture 8 Interconnect...

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1 ECE520 – Lecture 8 Slide: 1 University of New Mexico Office: ECE Bldg. 230B Office hours: Tuesday 2:00-3:00PM or by appointment E-mail: [email protected] Payman Zarkesh-Ha ECE520 – VLSI Design Lecture 8: Interconnect Manufacturing and Modeling ECE520 – Lecture 8 Slide: 2 University of New Mexico Review of Last Lecture CMOS Manufacturing Process Front-end Process Modern CMOS Process Salisidation Low Doped Drain (LDD) Shallow Trench Isolation (STI)
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