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Unformatted text preview: UNIVERSITY OF MISSOURI - COLUMBIA DEPARTMENT OF MECHANICAL AND AEROSPACE ENGINEERING MAE 3800 Instrumentation and Measurements Laboratory EXPERIMENT #4 Calibration of a solid state tilt sensor Due: Thursday, March 11 1. Synopsis 1.1 Objectives • To evaluate the linearity and hysteresis of a tilt sensor • To obtain least squares fit to the data in the linear range • To use Excel to generate tables and graphs 1.2 Equipment: • CXTA01 Solid State Tilt Sensor, CXTILT02E Digital Sensor. • Protractor mechanism • DC Power Supply • DMM to measure the output voltage 1.3 Suggested reading: 3.1-3.2 2. Description of the sensor A solid state tilt sensor is an example of a MEMS (Microelectromechanical Systems) device. The sensor directly couples mechanical elements with electrical elements. These elements are integrated on the same silicon chip. The chip is fabricated using batch processes which are widely used in making microprocessors. The miniature size and the low cost are two distinctive advantages of these sensors. The tilt sensor uses a micro-machined acceleration sensing element with a DC response to measure inclination relative to gravity. The response of the tilt sensor depends on the magnitude of gravity parallel to the sensor element. Since the magnitude of gravity parallel to the sensor element is a sine function of the angle, the sensor output voltage is the following function ) sin( φ a v v + = Therefore, to obtain accurate measurement of the tilt angle the above equation must be solved. For angles less than 20 o , the sine function can be approximated by a linear relationship: φ a v v + = Here v is the sensor voltage output, v is the zero angle voltage, and a is the sensitivity. The sensor whose output is a continuous function of the physical quantities is known as an analog sensor. CXTA01 is an analog sensor whose output voltage is directly related to the tilt angle....
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- Spring '10
- Microelectromechanical systems, Image sensor, tilt sensor