Lect4_RF Passives

Lect4_RF Passives - ECE 894 RF and mmWave Front-end Circuit...

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ECE 894 RF and mmWave Front-end Circuit Design Prof. Waleed Khalil Lecture RF Passives 4 1
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Passive Elements in RF Circuits 2 DC Biasing V ref V in Load Elements/Tuning Matching V out
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Sheet Resistance 3 22 2 : ( / ), con con con LL R RR R Wt W NR R L RN tW ρ =+= + = + = Ω=  R W L R con t Serpentine Resistors Improve aspect ratio for large resistors Each corner accounts for 0.56R 0.56R
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N-Well Resistors 4 High resistance R ~ 1-5 k / High parasitic capacitance N-well junction diode Accuracy Absolute ~ ± 40% Relative ~ ± 5% High temperature coefficient R (T) = R T0 (1+TCR . (T-T o )) TCR ~ 1000-5000 ppm/°C, T o =25 °C High voltage dependency (nonlinear) R (V) = R v0 (1+VCR . V) VCR ~ 5000-20,000ppm/V N-well p _ Sub
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Poly Resistors 5 Medium resistance R (unsilicided)~ 50-250 / Low parasitic capacitance poly over field oxide Accuracy Absolute ~ ± 30% Relative ~ ± 1% Low temperature coefficient TCR ~ 200-500 ppm/°C Ultra low voltage dependency VCR ~ 50-100 ppm/V FOX p _ Sub poly
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Poly Resistors 6 Medium resistance R (unsilicided)~ 50-250 / Low parasitic capacitance poly over field oxide Accuracy Absolute ~ ± 30% Relative ~ ± 1% Low temperature coefficient TCR ~ 200-500 ppm/°C Ultra low voltage dependency VCR ~ 50-100 ppm/V FOX p _ Sub poly
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Resistor’s RF Model R p : Poly sheet & contact resistance R sub : Substrate lateral resistance R s : Substrate dielectric loss C p : Field oxide (FOX) capacitance C s : FOX to substrate capacitance L p : Poly self inductance 7 R p C p /2 C p /2 L p C s /2 R sub R s /2 C s /2 R s /2 2 : , 2 (1-e ) 1 p sh con sh t o sub subo s sub ox p ox s sub L RR R R Wf L W R WLG C LW t C LWC δ ρρ πµ ε = += = = = = = , , are fitting parameters subo sub sub R CG “Device Modeling for Analog and RF CMOS Circuit Design,” T. Ytterdal, Y. Cheng and T. Fjeldly John Wiley & Sons , 2003
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Metal-Insulator-Metal (MIM) Capacitors Low-medium density cap 1-2 fF/ µ m 2 Low parasitic capacitance < 0.1 fF/ µ m 2 Accuracy
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Lect4_RF Passives - ECE 894 RF and mmWave Front-end Circuit...

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