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liu_j - NONLINEAR DYNAMICS OF A DUAL-BACKPLATE CAPACITIVE...

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NONLINEAR DYNAMICS OF A DUAL-BACKPLATE CAPACITIVE MEMS MICROPHONE By JIAN LIU A DISSERTATION PRESENTED TO THE GRADUATE SCHOOL OF THE UNIVERSITY OF FLORIDA IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY UNIVERSITY OF FLORIDA 2007
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Copyright 2007 by Jian Liu
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To my parents and my beloved wife, Zhen
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