L1 Overview - Overview of MEMS Agenda $ Syllabus $ E-Learning in Sakai $ What Where Who Why When How MEMS Senturia Ch 1 None 1 Lecture 1 Overview

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1 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold Overview of MEMS ! Senturia, Ch. 1 " None # Agenda $ Syllabus $ E-Learning in Sakai $ What, Where, Who, Why, When, How MEMS??
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2 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold What are MEMS?? % Micro-electro-mechanical Systems (MEMS) US % Micro ' small (typically 0.1 – 100 μm feature sizes) % Electro ' electrical component or functionality % Mechanical ' mechanical component or functionality % Systems ' integrated, system-like functionality % a.k.a. Microsystems Technology (MST) Europe % a.k.a. Micromachines Japan % In practice, MEMS applies to broader functional groups (electrical, mechanical, thermal, magnetic, fluidic, optical, chemical etc.) % Making miniature sensors and actuators % Involving almost every physical discipline % Leveraging existing IC fab technologies and creating new ones % Enabling technology for many emerging markets http://www.youtube.com/watch?v=ZuE4oVrtEQY
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3 Lecture 1 Overview EEL 5225, Fall 2010, David Arnold What are MEMS?? Nano Macro http:// mems.sandia.gov ±
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Lecture 1 Overview EEL 5225, Fall 2010, David Arnold Where are MEMS?? Broad range of MEMS applications . .. % Electro-Mechanical
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This note was uploaded on 01/17/2011 for the course EEL 5225 taught by Professor Arnold during the Fall '08 term at University of Florida.

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L1 Overview - Overview of MEMS Agenda $ Syllabus $ E-Learning in Sakai $ What Where Who Why When How MEMS Senturia Ch 1 None 1 Lecture 1 Overview

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