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L2 Transducers - Transducer Basics Agenda $ Energy Domains...

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1 Lecture 2 Transducer Basics EEL 5225, Fall 2010, David Arnold Transducer Basics ! Senturia, Ch. 2 " HW1, due 9/3 # Agenda $ Energy Domains & Transduction Mechanisms $ Transducer Specifications $ MEMS Transducer Design Methodology
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2 Lecture 2 Transducer Basics EEL 5225, Fall 2010, David Arnold Classification % Transducer % Element that converts one form of energy to another. % May include % sensors (for measurement) % actuators (for doing work) % Microsensor or microactuator % a sensor or actuator that is manufactured using microfabrication and/or micromachining techniques % Other microstructures that neither sense nor actuate. % Microchannels % Micronozzles % Microlenses, etc.
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3 Lecture 2 Transducer Basics EEL 5225, Fall 2010, David Arnold Transduction Mechanisms Ref. Smith, R.L. “Sensors”, The Electrical Engineering Handbook, Boca Raton, CRC Press LLC, 2000
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4 Lecture 2 Transducer Basics EEL 5225, Fall 2010, David Arnold Transduction Mechanisms Mechanical Piezoelectric Piezoresistive , Resistive, Capacitive, and Inductive effects Electrical Piezoresistive pressure sensor IMG at University of Florida Nitride Membrane ( 1 μ m ) Piezoresistors Cavity
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5 Lecture 2 Transducer Basics EEL 5225, Fall 2010, David Arnold Transduction Mechanisms Electrical Thermal Joule heating , Peltier effect OK, so a resister gets hot…. … but we can use this thermal energy for actuation.
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6 Lecture 2 Transducer Basics EEL 5225, Fall 2010, David Arnold Transduction Mechanisms Thermal Thermal expansion , radiometer effect Mechanical IMG at University of Florida oxide silicon substrate metal poly-Si silicon mirror Bimorph actuator x z bimorph actuator mirror mirror bimorph actuators 1mm frame Thermally actuated micromirrors
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7 Lecture 2 Transducer Basics EEL 5225, Fall 2010, David Arnold Transducer Specifications Definitions: p(t) = physical variable x(t) = sensor excitation y(t) = sensor response p meas
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