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EEL 5225 F10 Exam2 Solutions

# EEL 5225 F10 Exam2 Solutions - EEL5225 Principles of MEMS...

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Page 1 of 1 EEL5225 Principles of MEMS Transducers Exam 2 Fall 2010 Semester Wednesday, 11/17 Name: _____________________________ Honor Code: We, the members of the University of Florida community, pledge to hold ourselves and our peers to the highest standards of honesty and integrity. __________________________ Signature Part I – Short Answer 50 pts. 10 questions Part II – Process Flow 50 pts. 3 questions Total : 100 pts. Instructions: Sign the Honor Code statement above. Be sure you have all 7 pages before starting the exam. Read and follow the directions for each section carefully. Use only the paper provided in the exam. Write on the backside of the paper if necessary. Only one 3” x 5” index card with notes and a calculator is permitted during the exam.

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Page 2 of 2 Part I – Short Answer (50 points total, 5 points per question) Answer each question briefly . Sketches can be used where appropriate. 1. & 2. Fill in the chart with the appropriate name and units for the circuit models that we developed: Electrical Mechanical Fluidic/Acoustic Magnetic Effort Volts (V) Force (N) Pressure (N/m 2 ) MMF (m/s) Flow Current (A) Velocity (m/s) Volume Velocity (Volumetric Flow) (m 3 /s) Time rate change of flux (Wb/s) Displacement Charge (C) Displacement (m) Volumetric displacement (m 3 ) Flux (Wb) 3. From an energy description, what is the difference between an ideal compliance and an ideal inertance? Compliance: Stored potential energy Inertance: Stored kinetic energy 4. Explain why the effective lumped mass of a cantilever beam is less than the actual mass of the beam.
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