EEL 5225 F10 Exam3 Solutions

EEL 5225 F10 Exam3 Solutions - Page 1 of 7 EEL5225...

Info iconThis preview shows pages 1–4. Sign up to view the full content.

View Full Document Right Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon

Info iconThis preview has intentionally blurred sections. Sign up to view the full version.

View Full DocumentRight Arrow Icon
This is the end of the preview. Sign up to access the rest of the document.

Unformatted text preview: Page 1 of 7 EEL5225 Principles of MEMS Transducers Exam 3 Fall 2010 Semester Tuesday, 12/14 Name: _____________________________ Honor Code: We, the members of the University of Florida community, pledge to hold ourselves and our peers to the highest standards of honesty and integrity. __________________________ Signature Part I Short Answer 50 pts. 10 questions Part II Process/Comput. 50 pts. 3 questions Total : 100 pts. Instructions: Sign the Honor Code statement above. Be sure you have all 7 pages before starting the exam. Read and follow the directions for each section carefully. Use only the paper provided in the exam. Write on the backside of the paper if necessary. Only a calculator and three 3 x 5 index cards with notes are permitted during the exam. Page 2 of 7 Part I Short Answer (50 points total, 5 points per question) Answer each question briefly . Sketches can be used where appropriate. 1. Label each picture as surface-micromachined or bulk-micromachined 2. Explain what a sacrificial layer is and provide a common example. 3. With all of the complication and confusion associated with lumped element modeling, list two advantages of lumped element modeling compared to numerical methods, finite-element methods, or other modeling approaches. Surface Surface Bulk Bulk Provides physical insight Fast, computationally efficient Yields analytic solutions Yields first-order approximations Captures multi-energy-domain behavior Used as a structural layer during layer building (e.g. SiO2 for surface micromachining), but subsequently etched away to release a mechanical element. Page 3 of 7 4. Sketch a drawing that graphically illustrates the lumped assumption. Use text only where necessary. Sketch a drawing that graphically illustrates the lumped assumption....
View Full Document

Page1 / 7

EEL 5225 F10 Exam3 Solutions - Page 1 of 7 EEL5225...

This preview shows document pages 1 - 4. Sign up to view the full document.

View Full Document Right Arrow Icon
Ask a homework question - tutors are online