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Unformatted text preview: Principles of MEMS Transducers Page 1 of 4 Prepared by D. Arnold August 30, 2010 EEL5225 Principles of MEMS Transducers HW1 Fall 2010 Semester Assigned: Friday, 8/28 Due: Friday, 9/3 1. From the specification sheet for the Kulite XCS-190 (15 psi model) pressure transducer (see attached), determine the following a. Rated voltage input V input = rated electrical excitation = 10V d.c. b. Nominal sensor power requirements Power = V input I input = V input 2 / R sensor = (10V) 2 / 1kohm = 100 mW c. Sensor sensitivity Full scale output = 200 mV Full scale input = 15 psi S = Full _ scale _ output Full _ scale _ input = 13.33 mV/psi d. MDS assuming a resolution of 0.05 mV for the voltage measurement system (Note the specification sheet lists “Infinitesimal” for resolution) Assuming that the output resolution is limited by rms output voltage noise, Vn = 0.05 mV MDS = Vn S = 3.751x10-3 psi e. Dynamic range Hence, the minimum pressure signal is limited by the MDS while the maximum pressure in the linear range is determined by the full scale input. the linear range is determined by the full scale input....
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This note was uploaded on 01/17/2011 for the course EEL 5225 taught by Professor Arnold during the Fall '08 term at University of Florida.
- Fall '08