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homework_lec1-lec14_

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Lec 1- overview of microelectronic fabrication 1. A simple pn junction diode is shown in cross section in the following Fig. Make a possible process flowchart for fabrication of this structure, including mask steps. Problem 1. Solutions: 2. Draw a set of contact and metal masks for the bipolar transistor of above Figure. Use square contact windows with one contact to the emitter and two contacts to the base and collector regions. Solutions: Assume negative photoresist is used. mask 3 Thermal Oxidation mask 1 N+ window definition (photolithography) Phosphorous diffusion & oxidation Metal deposition Metal lithography Contact opening definition ( photolithography) mask 2 N+ window etch Contact etch Metallization etch Problem 1. Problem 2. Generated by Foxit PDF Creator © Foxit Software http://www.foxitsoftware.com For evaluation only.
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