Lecture 14 Ellipsometery and reflectometry

Lecture 14 Ellipsometery and reflectometry - Reflectometry...

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eflectometry and Ellipsometry Reflectometry and Ellipsometry • Optical constants of bulk materials and thin films important for • HR, AR coatings • DBRs • Waveguide design ain loss calculations • Gain, loss calculations • Measure by Ellipsometry, Reflectometry, or prism coupling Spring 2010 Mat 288S Optoelectronic Measurements 1
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ptical Constants Optical Constants Complex dielectric function or index of refraction ( ) ε k n ik n i ~ 2 2 1 2 2 1 = + = + = k: extinction coefficient k 2 2 = α : absorption coefficient λ π α k 4 = Spring 2010 Mat 288S Optoelectronic Measurements 2
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ramers Kronig Relation Kramers Kronig Relation ( ) = ω ε 2 1 ( ) π d P 1 () ( ) = d P 1 2 1 Refractive index arises from absorption p Real and imaginary parts are linked Spring 2010 Mat 288S Optoelectronic Measurements 3
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nell’s Law and Fresnel Equations Snell s Law and Fresnel Equations Govern magnitude and phase of reflection or transmission omplex: magnitude and phase Co p e : g ude d p se “plane of incidence” defined by incident and reflected beams olarization” in the plane of incidence; “s r n ol” is Spring 2010 Mat 288S Optoelectronic Measurements 4 p-polarization in the plane of incidence; s- or n-pol is
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resnel Equations Graphed Fresnel Equations Graphed Spring 2010 Mat 288S Optoelectronic Measurements 5
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ultilayers Multilayers Net amplitude reflection is sum of individual complex reflections
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This note was uploaded on 02/02/2011 for the course ECE 227A taught by Professor Coldren during the Spring '08 term at UCSB.

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Lecture 14 Ellipsometery and reflectometry - Reflectometry...

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