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Lecture 14 Ellipsometery and reflectometry

Lecture 14 Ellipsometery and reflectometry - Reflectometry...

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Reflectometry and Ellipsometry • Optical constants of bulk materials and thin films important for • HR, AR coatings • DBRs • Waveguide design • Gain loss calculations • Gain, loss calculations • Measure by Ellipsometry, Reflectometry, or prism coupling Spring 2010 Mat 288S Optoelectronic Measurements 1
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Optical Constants l di l i f i ( ) 2 Complex dielectric function or index of refraction ε ε ε ε k n ik n i ~ 2 2 1 2 1 = + = + = k: extinction coefficient ε k k 4 2 2 = α : absorption coefficient λ π α = Spring 2010 Mat 288S Optoelectronic Measurements 2
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Kramers Kronig Relation ( ) ( ) = ω ω ε ω ε d P 2 1 1 ( ) ω ω π ( ) = ω ω ω ω ε π ω ε d P 1 2 1 Refractive index arises from absorption Real and imaginary parts are linked Spring 2010 Mat 288S Optoelectronic Measurements 3
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