Lec16 Schottky Diode

Lec16 Schottky Diode - EECS 320 Metal-Semiconductor...

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EECS 320 Metal-Semiconductor Junction, Schottky Diode
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Metal-Semiconductor Junctions Metals are used for: Device-level interconnects Component-level interconnects Devices Microprocessor Top View ten-metal-level metal interconnect structure projected for the 35-nm technology node.
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Metal-Semiconductor Junction Metal Semiconductor E vac E C E V E F E F q φ M E vac E C q φ S E V
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Band Diagram For Metal-Semiconductor Sketch what you would expect for the band diagram of a metal-semiconductor junction with n-type material and the cases φ M > φ S and φ M < φ S
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Equilibrium Band Diagram E vac qV bi E C E V q χ q φ M q φ B q φ S Charge redistribution near junction, Fermi level flat in equilibrium ρ d d x qN Q = D bi S d qN V x W ε 2 = E S d d x qN = max E
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() + = = f C M S M bi E E q V 1 χ φ E vac qV bi E C E V q χ q φ M q φ B E vac qV bi E C E V q χ q φ M φ M > φ S , n-type φ M < φ S , n-type φ M > φ M
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Lec16 Schottky Diode - EECS 320 Metal-Semiconductor...

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