MEMS - Alex Englesbe and Esteban Escobar 1. Introduction to...

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Alex Englesbe and Esteban Escobar
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1. Introduction to MEMS 2. Micromachining 3. Physics of Microelectronics 4. RIE and DRIE 5. Silicon Carbide 6. Solution Proposals 7. Concluding Remarks
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Very small electrically- driven mechanical devices Size-scale <1mm Control and actuation are local – not separate Growing prevalence in today’s tech.
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Sensors and actuators Accelerometer, inkjet head, mirrors Micro-turbine Charge pump
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Surface vs. bulk micromachining Some methods: Physical Vapor Deposition Chemical Vapor Deposition (LP and AP) Chemical etching Photolithography Microelectronics Manufacturing
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1. Chemical etching 2. Ion-enhanced etching 3. Mechanical etching 4. Trenching 5. Sidewall passivation 6. Mask erosion
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Plasma etching process Vacuum chamber contains electrode plates Feed gas is ionized by inductive coupling Work piece is attached to an electrode driven by AC SF 6 mixed with O 2 and and sometimes Ar are popular feed gases
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This note was uploaded on 02/09/2011 for the course MECHE 454 taught by Professor Ronzhues during the Fall '11 term at Johns Hopkins.

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MEMS - Alex Englesbe and Esteban Escobar 1. Introduction to...

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