HW6 Sol

HW6 Sol - UCLA MAE 183 HW#6 Solutions Fall 2010 Review Q...

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1 UCLA MAE 183 HW#6 Solutions – Fall 2010 Review Q 35.1: What is an integrated circuit? Answer . An integrated circuit is a collection of electronic devices (e.g., transistors, diodes, resistors) that have been fabricated and electrically intraconnected onto the surface of a small flat chip of semiconductor material. Review Q 35.3: Describe the planar process. Answer . The fabrication of an IC chip by a sequence of layering processes - adding, altering, and removing layers to create the devices and their intraconnection on the IC chip. Review Q 35.4: What are the three major stages in the production of silicon-based integrated circuits? Answer . The three stages are (1) silicon processing, to produce very pure silicon and shape it into wafers; (2) IC fabrication, in which layers are added, altered, and removed in selected regions to form electronic devices on the face of the wafer; and (3) IC packaging, in which the wafers are tested, cut into chips, and the chips are encapsulated in a package. Review Q 35.8: What are the alternatives to photolithography in IC processing? Answer . Alternatives to photolithography are extreme ultraviolet (EUV) lithography (but technically EUV is still a photolithography technique, so you may skip this method), electron-beam lithography, X-ray lithography, and ion-beam lithography. Review Q 35.12:
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HW6 Sol - UCLA MAE 183 HW#6 Solutions Fall 2010 Review Q...

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