Microelectromechanical Systems

Microelectromechanical Systems - EE 515/415 MEMS Wk 2...

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EE 515/415 MEMS Wk 2: Applications & Photolithography David T. Shaw EE Fall 2009
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Traditional Applications (1992)
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Inertial Devices: MEMS Inertial Measurement Units (IMU’s) MEMS lock arming system MEMS Gyroscopes MEMS JET / ROCKET ENGINE RF MEMS Telecomms
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MEMS for Ordnance R &D Status
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