project wk 3)

project wk 3) - EE415/515 Project Photolithography D Shaw...

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EE415/515 Project + Photolithography D. Shaw EE 9/15/09
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Project Proposal The best project is one that creates a product which is solving a problem. Imaging that you are working for a small business, you are asked to develop a proposal for the manufacturing of a product based on MEMS technology You are strongly discouraged to be inventive ! You can use a MEMS device that has already been developed as a template , but you must improve on it. clearly show how you improve on the device and that the device will be better or is unique. 1-2 single-space page (Due in 2 weeks) The major challenges in the project, as seen by the team The fundamental approach (e.g., a piezoresistive bulk- micromachined accelerometer) Which tasks are assigned to which team members, along with a rough timeline At least 4 journal papers + additional websites and patents
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Conceptual Design Steps The conceptual design steps: Define engineering specifications Establish functional structures Search for appropriate working (physical) principles Evaluation of concept variants against technical and economic criteria. Generate design alternative Analyze alternatives Evaluate alternatives
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Conceptual Design Process
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What is the Conceptual Design process? The generation of design concepts and the supporting analysis to determine the feasibility of most suitable alternative. What is a Design Concept ? It is a design alternative that includes at least one physical principle and one abstract embodiment
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For example, RF commucation is a physical principle that is used in communication. An RF MEMS switch is the embodiment which is a diagram that shows the relative relationship between the components in the design. It needs not be to scale.
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Project Examples A piezoresistive sensor for biomolecular recognition Physical principle: Piezoresistive effect Embodiment: Cantilever sensors The goal of this project is to create cantilever-based device that detects stress induced by molecular binding. Cantilevers will be created with integrated poly-Si piezoresistors. The device will be used in a hand-held point-of-care diagnostic monitor and so must be robust, small, and connected to a circuit that gives an output proportional to the biomolecular concentration.
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Project Examples RF-IF filter Physical principle: Mechanical resonance Embodiment: MEMS filter The superheterodyne radio receiver uses a nonlinear frequency converter in combination with a tunable local oscillator to convert the incoming radio signal to a lower fixed frequency (the so-called “intermediate frequency” or “if”). The goal of this project is to design a surface-micromachined silicon resonator or combination of resonators that are used to create an if filter for incorporation into a one-chip radio.
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Project Examples A micro tester for measuring the compliance of microstructures
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This note was uploaded on 02/19/2011 for the course EE 515 taught by Professor Dr.shaw during the Fall '10 term at SUNY Buffalo.

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project wk 3) - EE415/515 Project Photolithography D Shaw...

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