Week-6-b-Thin-films

Week-6-b-Thin-films - EE-504L :Solid State Processing and...

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EE-504L :Solid State Processing and Integrated Circuit Laboratory Dr. Kian Kaviani ing Hsieh Electrical Engineering Ming Hsieh Electrical Engineering Dept. USC Viterbi School of Engineering 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 1
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hin Films in IC Industry Thin Films in IC Industry 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 2
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arious Techniques for Thin Film Formation Various Techniques for Thin Film Formation here are three general techniques that can There are three general techniques that can be used to form thin films: 1. Film – growth by interaction of a vapor deposited gy p p species with the substrate 2. Film – formation by deposition without causing changes to the substrate material. 3. Coating of the substrate with a liquid, which is then dried to form the solid thin – film. 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 3
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Thin Film Deposition Group – 1: hermal Oxidation Thermal Oxidation – Thermal Nitridation – Silicide Formation Group – 2: – Chemical Vapor Deposition (CVD)
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This note was uploaded on 02/23/2011 for the course EE 474 taught by Professor Lingo during the Spring '11 term at USC.

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Week-6-b-Thin-films - EE-504L :Solid State Processing and...

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