Week-7-diffusion

Week-7-diffusion - EE-504L:Solid State Processing and...

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EE-504L :Solid State Processing and Integrated Circuit Laboratory Dr. Kian Kaviani sieh Ming Electrical Engineering Hsieh Ming Electrical Engineering Dept. University of Southern California Viterbi School of Engineering 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 1
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Diffusion in Solids 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 2
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Introduction Diffusion : A natural phenomena by which the substances move from regions of higher concentration to regions of lower oncentration concentration. Diffusion process stops when the concentration of material ecome uniform everywhere become uniform everywhere. There are three types of diffusion processes which are ifferent in the medium that the diffusion process takes place: different in the medium that the diffusion process takes place: 1. Gas phase diffusion 2. Liquid phase diffusion 3. Solid State diffusion 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 3
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as & Liquid State Diffusion Gas & Liquid State Diffusion 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 4
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olid tate Diffusion Solid State Diffusion 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 5
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tomic Scale of Diffusion in Solids Atomic Scale of Diffusion in Solids There are two types of atomic scale diffusion in solids: Interstitial impurities Substitutional impurities Interstitial Impurity Atom 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 6
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ubstitutional Impurities Substitutional Impurities • The diffusion of impurities that replace silicon atoms on the lattice – sites ( substitutional impurities , such as P, As, & B) requires one of the following mechanisms: 1.Direct Exchange 2.Vacancy - Assisted Movement 3.Interstitial - Assisted Movement 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 7
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ubstitutional Impurities Substitutional Impurities a) Direct Exchange )g b) Vacancy Aided Mechanism
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This note was uploaded on 02/23/2011 for the course EE 474 taught by Professor Lingo during the Spring '11 term at USC.

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Week-7-diffusion - EE-504L:Solid State Processing and...

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