Week-12-CMOS

Week-12-CMOS - EE 504L CMOS CMOS Processing Dr. Kian...

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EE – 504L CMOS Processing Dr. Kian Kaviani Ming Hsieh Electrical Engineering Dept. University of Southern California, Viterbi School of Engineering 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 1
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asic Concept in CMOS Basic Concept in CMOS 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 2
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- View of a CMOS 3 D View of a CMOS 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 3
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tep : hoice of Substrate Step 1: Choice of Substrate 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 4
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Step – 2 & 3: SiN Deposition Mask - 1 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 5
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tep : hannel Stop Implant Step – 4: Channel Stop Implant 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 6
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Step – 5: Formation of LOCOS Loc al O xidation of S ilicon 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 7
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Step – 5: Formation of LOCOS 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 8
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Step 6 & 7: P–Well Formation & Mask– 2 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 9
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Step 8 & 9: N–Well Formation & Mask– 3 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 10
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Step–10: Drive–in & Formation of n&p Tubs 1/3/2011 Dr. Kian Kaviani - Spring 2011 - EE504L 11
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Week-12-CMOS - EE 504L CMOS CMOS Processing Dr. Kian...

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