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Lecture_Ch1 - 8 Miller Indices Example Intercept Points x y...

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1 General Introduction to Semiconductors (Ch. 1) • Elemental Composition of Semiconductors • Basic Crystal Structure • Cubic Structures, including Diamond Lattice • Miller Indices • Basic Crystal Growth Techniques Transistors in Integrated Circuit From ITRS Roadmap
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2 Electronic Materials Insulators Semiconductors Working defn: Conductivity can be tuned by impurities, temp, light, etc. Conductors (Metals) Table 1.2 Periodic Chart
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3 Common Semiconductor Materials Silicon (Si) Gallium Arsenide (GaAs) Ga As x P 1-x Ga x In 1-x N Silicon Carbide (SiC) Table 1.1 Semi Materials (a)
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4 Table 1.1 Semi Materials (b) Symbol Fig. 1.1 (Solid classifications)
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5 Bonding Model for Atoms in Crystal Simple Cubic Body-Centered Cubic FCC Lattice – 3D
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6 Bonding Model for Atoms in Crystal Face-Centered Cubic Diamond Lattice (Silicon) Diamond Lattice – 3D
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7 Cubic Crystals -- Major Crystallographic Directions Silicon Crystal Lattice (Diamond Structure)
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Unformatted text preview: 8 Miller Indices -- Example Intercept Points: x y z Reciprocal: Miller Indices: ( , , ) Miller Indices – Con’t. x y z ( 1 , 1 , 2 ) x y z ( 1 , 1 , 2 ) 9 Miller Indices – Con’t. x y z ( 1 , 0 , 0 ) x y z ( 0 , 1 , 0 ) Miller Indices – Nomenclature x y z Plane: ( 1 , 1 , 1 ) Family of Planes: {1 , 1 , 1 } e.g. (1,1,1,), (1, 1, 1), (1, 1, 1), … Direction normal to plane: [ 1 , 1 , 1 ] Family of planes: < 1 , 1 , 1 > 10 Unit Cells (2-D Representation) a a Unit Cell Unit Cell a a Unit Cells (2-D Representation) 11 Semiconductor Impurities Si crystal: ~ 5 x 10 22 atoms/cm 3 Background Impurities: < 5 x 10 13 atoms/cm 3 Intentional Impurities: 10 14 to 10 21 atoms/cm 3 Si Boule Growth – Czochralski Method 12 Fig. 1.5 (Silicon wafers) Fig. 1.9(c) (Si single crystal ingot)...
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