EMS162_2011_Lecture8

EMS162_2011_Lecture8 - Electron Microscopy Techniques...

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1 1/27/2011 EMS 162 - Winter 2011 1 Yayoi Takamura Electron Microscopy Techniques • Electrons are not part of the electromagnetic spectrum • Scanning Electron Microscopy (SEM) • Transmission Electron Microscopy (TEM) • Scanning Transmission Electron Microscopy (STEM) 2 0 0 0 0 2 1 1 2 2 c m eU eU m h eU m h v m h p h + = = = = λ considering relativistic effects U =accelerating voltage, m 0 = electron mass, e = electron charge 1/27/2011 EMS 162 - Winter 2011 2 Yayoi Takamura Scanning Electron Microscope User computer interface Pumps, control boxes, etc… Sample Chamber Electron gun Detector
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1/27/2011 EMS 162 - Winter 2011 3 Yayoi Takamura Electron – Sample Interactions Sample Incoming Electron Beam Secondary Electrons Backscattered Electrons Auger Electrons X-rays Cathodoluminescence (visible light) Diffracted Electrons 2 0 0 0 0 2 1 1 2 2 c m eU eU m h eU m h v m h p h + = = = = λ For electrons: considering relativistic effects U =accelerating voltage, m 0 = electron mass, e = electron charge 1/27/2011 EMS 162 - Winter 2011 4 Yayoi Takamura Interaction Volume • Interaction volume depends on: – Diameter of the primary beam – Energy of the primary beam – Atomic weight of the specimen – Coating of the specimen • Escape Depth: – X-rays can escape from further
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EMS162_2011_Lecture8 - Electron Microscopy Techniques...

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