EMS162_2011_Lecture17

EMS162_2011_Lecture17 - 1 3/1/2011 Thin Film Diffraction 10...

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Unformatted text preview: 1 3/1/2011 Thin Film Diffraction 10 Yayoi Takamura Applications of Thin Films Electronic & magnetic devices information technology Central processing unit (CPU) of computers, solid state memory Hard drives, magnetic random access memory Fujitsu EETimes 3/1/2011 Thin Film Diffraction 11 Yayoi Takamura Applications of Thin Films Optical devices Thin film solar cells, antireflective coatings Computer/tablet/iPhone displays Semiconductor lasers E Ink 2 3/1/2011 Thin Film Diffraction 12 Yayoi Takamura Applications of Thin Films Microelectomechanical Systems (MEMS) Mechanical devices driven by electrical signals Sensors 3/1/2011 Thin Film Diffraction 13 Yayoi Takamura Epitaxial Film vs. Polycrystalline Bulk Epitaxial Film Polycrystalline Bulk 20 40 60 80 100 120 10 10 1 10 2 10 3 10 4 10 5 10 6 10 7 (004) (002) (003) (004) (003) (002) (001) BZY-STO Intensity (CPS) 2 theta (degrees) (001) Ba(Zr 0.8 Y 0.2 )O 3 3 3/1/2011 Thin Film Diffraction 14 Yayoi Takamura Ba(Zr 0.8 Y 0.2 )O 3 on MgO Structure of Materials, De Graef and McHenry, Cambridge University Press MgO a =4.2 BZY a =4.21 3/1/2011 Thin Film Diffraction 15 Yayoi Takamura Film Thickness Dependence Broadening due to small thickness Broadening due to non- uniform strain as the thin film has relaxed Log Scale Note: Log (intensity) scale used to show the film and substrate peak which differ in intensity by several orders of magnitude 4...
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EMS162_2011_Lecture17 - 1 3/1/2011 Thin Film Diffraction 10...

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