Fabrication of silicon-based actuators using05657224

Fabrication of silicon-based actuators using05657224 - This...

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Copyright (c) 2010 IEEE. Personal use is permitted. For any other purposes, Permission must be obtained from the IEEE by emailing [email protected] This article has been accepted for publication in a future issue of this journal, but has not been fully edited. Content may change prior to final publication. 1 Abstract —We report a novel interdigital sensor and actuator device based on branched treelike carbon nanotubes (CNT) on silicon-based membranes with a high capacitance value. The presence of treelike CNTs leads to a high overlap between interdigital fingers owing to their three dimensional nanometric features, hence increasing the value of the capacitance from 0.2 to 15 pF. The electro-mechanical behavior of the device has been investigated with monitoring capacitive characteristics of the sensor. An almost linear rise in the capacitance value by applying the external voltage is observed which could be due to the modulated overlapping between neighboring electrodes. The response of the sensor/actuator device to various frequencies has been studied. Index Terms —carbon nanostructures, micro electromechanical actuator, sensor. I. INTRODUCTION Exceptional electrical and mechanical properties of carbon nanotubes have attracted the attention of many researchers. Their unique characteristics such as small size, high stiffness, flexibility and strength [1], high electrical and thermal conductivity as well as their exceptional electromechanical characteristics [2] propound great applications in nano- technology. The incorporation of nano-structures in micro and nano-electromechanical systems has made great enhancement in the performance of such devices [3]. As examples of carbon nanotube-based devices are nano tweezers and grippers [4], nano switches and nano relays [5-7] and CNT-based bearing for nano-rotational devices [8, 9]. The high aspect ratio of CNTs has exemplified them as excellent electron emitters suitable for field emission displays [10, 11] and nano lithography [12]. We have recently reported the realization of branched carbon nanotubes (BCNT) on silicon substrates by means of a plasma enhanced chemical vapor deposition [13]. In this paper, we report for the first time, the application of branched nano structures to realize electrostatic actuator-sensor systems Manuscript received May 2010. This work has been supported with a grant from Research Council of the University of Tehran and Nano-Electronic Center of Excellence. Authors are with the Nano-Electronic Laboratory, School of Electrical and Computer Engineering, University of Tehran, Tehran, Iran ([email protected]; [email protected]; [email protected]) (Corresponding author phone: +982188013201; fax: +982188013201; e- mail: [email protected]) on silicon-based membranes. The investigation of the electromechanical behavior of these carbon nano-structures shows the rise in their capacitance value by the applied external voltage. The physical characteristics of the branched nano-structures have been investigated using field emission
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This note was uploaded on 05/08/2011 for the course MECHANICAL 203 taught by Professor Krishna during the Spring '11 term at Akademia Ekonomiczna w Poznaniu.

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Fabrication of silicon-based actuators using05657224 - This...

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