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Piezoresistive+accelerometers

Piezoresistive+accelerometers - Piezoresistive...

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Piezoresistive Accelerometers SEN2MET
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In plane piezoresistive accelerometer for structural monitoring Journal of Aerospace engineering ASCE July 2003 pp. 108-114
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Piezoresistive Accelerometers First piezoresistive silicon accelerometer prototype developed at Stanford in 1979. Not successful in mass production and industrial applications until the late 1980s. Single crystalline silicon wafer Piezoresistors formed by selective diffusion Resistor on frame and beam form a half bridge by metallization
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Cantilever beam accelerometers-1 Basic equations for deflection and stress: M(x) is bending moment along beam Should be 2!
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Cantilever beam accelerometers-2 Setting x=a 1 /2 for average resistor position Sensitivity very dependent on beam thickness:
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