Introduction to micromechanical transducers part 1

Introduction to micromechanical transducers part 1 -...

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SEN2MET Sensors and actuators Autumn 2010 Course introduction hans.j.alker@hive.no 1 SEN2MET Lecture #1 Course introduction
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SEN2MET Lecture #1 Course introduction 2 SEN2MET Lecturers and course outline D2-48 D2-48
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SEN2MET Lecture #1 Course introduction 3 Monday Tuesday Wednesday Thursday Friday
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SEN2MET Lecture #1 Course introduction 4 SEN2MET Schedule
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SEN2MET Lecture #1 Course introduction 5 SEN2MET practical details • The course web-site is: http://www.fronter.com/oa where you find: – Course announcements and student email addresses – Homework and folder for uploading homework answers – Lecture and project notes – Scientific papers for student colloquium – Textbook copy
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SEN2MET Lecture #1 Course introduction 6 SEN2MET textbook details Textbook: • Chap 2-5 outlines the basic mechanics and physical principles of mechanical sensors and actuators • Chap 6-9 discusses design details of pressure sensors, accelerometers and gyroscopes
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SEN2MET Lecture #1 Course introduction 7 SEN2MET textbook outline: Systematic treatment of micro dynamics and sensing schemes for micro mechanical transducers Micro-dynamics Sensing schemes Sensor devices Basic mechanics Capacitive sensing Pressure sensors Air damping Piezoresistive sensing Accelerometers Electrostatic driving Vibratory sensing Gyroscopes
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introduction 8 SEN2MET project 30 % scoring In the course SEN2MET there is a mandatory project work. A written report should be written and an oral presentation of the project results should be given. The students can work in groups of two by two or alone. In this project work the student will use COMSOL to simulate simple test structures. The simulated results should be compared with analytical expressions that the student has to derive themselves. The students can select any MEMS related project found in the COMSOL documentation. It is also possible to define a project related to your master thesis project as long as this is a theoretical and simulation project. A more detailed description of possible problems can be found in the COMSOL documentation. The report should as a minimum include the following: • Summary • Introduction • Derivation of analytical formulas or reference to a book/paper giving the derivation • Comparison between analytical and simulation results • Discussion of reasons for differences between analytical and simulation results • Conclusions • References • As extra work try to make the model more realistic including more real life effects. It is up to the students to determine how to do this and how far they want to push this. The report should not be as large as a master thesis. Make it specific and straight to the point. The IEEE format
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Introduction to micromechanical transducers part 1 -...

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