Introduction to micromechanical transducers part 2

Introduction to micromechanical transducers part 2 -...

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SEN2MET Chapter #2, part 1 1 SEN2MET Sensors and actuators, lecture 2 Chapter 2 – part 1: Basic mechanics of beams and diaphragm structures hans.j.alker@hive.no 1. Stress and strain fundamentals (review) 2. Stress and strain of beam structures (review) 3. Vibration frequency by energy method, the Rayleigh-Ritz method 4. Damped and forced vibration 5. Basic mechanics of diaphragms
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SEN2MET Course plan Update Aug26 th : new dates for start of project SEN2MET Chapter #2, part 1 2
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MEMS sensors and actuators SEN2MET Chapter #2, part 1 3 MEMS in Wikipedia: Microelectromechanical systems ( MEMS ) (also written as micro- electro-mechanical , MicroElectroMechanical or microelectronic and microelectromechanical systems ) is the technology of very small mechanical devices driven by electricity; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or Micro Systems Technology - MST (in Europe)”. MEMS combine electronics and mechanical system designs with scale-down fabrication methods to create small sensors and actuators devices. Our course SEN2MET combines the disciplines of electronic and mechanics courses from the 1 st year: • ELN1M Electronic System Design • MEC1M Applied Mechanics
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SEN2MET Chapter #2, part 1 4 Elasticity and plasticity, review Elastic vs. Plastic Deformation of Solids – Elastic deformation in response to an external applied force, then recovers when the force is removed – Plastic deformation does not recover when the force is removed Internal force and deformation considers: 1. Stress analysis Force per unit area acting on a surface of a differential volume element of a solid body Units of pressure (100 KPa= 1atm) Normal stresses and shear stresses 2. Strain analysis Differential deformation in response to an external applied force Change in length per unit length (dimensionless) Uniaxial strain and shear strain
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The mechanical theory side: Continuum mechanics and stress/strain analysis of a solid play a central role SEN2MET Chapter #2, part 1 5 Stress/strain analysis of solids Stress: The force intensity distribution on internal surfaces The resulting deformation: Strain components on a given surface
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SEN2MET Chapter #2, part 1 6 Stress and stain relationship in solids Material dependencies Elasticity and plasticity (linear/non-linear) domains for a given material Metals
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This note was uploaded on 05/30/2011 for the course SEN 2MET taught by Professor Ulrikhanke during the Spring '11 term at VCU.

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Introduction to micromechanical transducers part 2 -...

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