chapter37;38

chapter37;38 - 37.1 Define MEMS MEMS is an acronym for...

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37.1 Define MEMS. MEMS is an acronym for microelectromechanical system (or micro electro mechanical system), originally to indicate it is a miniaturized system consisting of both electronic and mechanical elements. Now it covers more than electronic and mechanical. 37.2 What is the approximate size scale in microsystem technology? 1*10^-6m 37.3 Why is it reasonable to believe that microsystem products would be available at lower costs than products of larger, more conventional size? Because they tend to be batch processed, a unit price is low when mass produced. Also, because less material is used (which is what the textbook says as the main reason). 37.4 What is a hybrid microsensor? The sensing element(transducer) is combined with electronics components in the same device 37.5 What are some of the basic types of microsystem devices? 1. Microsensors 2. Microactuators 3. Microstructures and microcomponents 4. Microsystems and micro-instruments 37.6 Name some products that represent MEMS/MST technology? The text discusses ink-jet printing heads, thin-film magnetic heads, compact discs (CDs), digital versatile discs (DVDs), various automotive sensors (e.g., airbag sensor, pressure sensor), light processing chips (e.g., TI’s DLP HDTV). 37.7 Why is silicon a desirable work material in microsystem technology? Microdevices often include electronic circuits, so both the circuit and the device can be made on the same substrate Silicon has good mechanical properties: High strength and elasticity, good hardness, and relatively low density The main reason is that the micromachining technologies available were for silicon (i.e. IC fabrication). 37.8 What is meant by the term “aspect ratio” in microsystem technology? The height-to-width ratio of the features produced 37.9 What is the difference between bulk micromachining and surface micromachining? Bulk micromachining refers to a relatively deep etching process into a substrate (e.g., Si wafer). Surface micromachining refers to the planar structuring on the substrate using much more shallow layering processes.Bulk micromachining refers to a relatively deep etching process into a substrate (e.g., Si wafer). Surface micromachining refers to the planar structuring on the substrate using much more shallow layering processes. 1
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37.10 What are the three steps in the LIGA process? LIthographie (in particular X-ray lithography) Galvanoformung (translated electrodeposition or electroforming) Abformtechnik (plastic molding) 38.1 What is the range of feature sizes of entities associated with nanotechnology? 1nm to 100nm
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chapter37;38 - 37.1 Define MEMS MEMS is an acronym for...

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