13+Schottky+Diode - EECS 320 Metal-Semiconductor Junction...

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Unformatted text preview: EECS 320 Metal-Semiconductor Junction, Schottky Diode Metal-Semiconductor Junctions • Metals are used for: – Device-level interconnects – Component-level interconnects – Devices Microprocessor Top View ten-metal-level metal interconnect structure projected for the 35-nm technology node. Metal-Semiconductor Junction Metal Semiconductor E vac E C E V E F E F q φ M E vac E C q φ S E V Band Diagram For Metal-Semiconductor Sketch what you would expect for the band diagram of a metal-semiconductor junction with n-type material and the cases φ M > φ S and φ M < φ S Equilibrium Band Diagram E vac qV bi E C E V q χ q φ M q φ B q φ S Charge redistribution near junction, Fermi level flat in equilibrium ρ d d x qN Q = D bi S d qN V x W ε 2 = ≈ E S d d x qN ε − = max E What is V bi ? Built-In Potential ( ) ⎥ ⎦ ⎤ ⎢ ⎣ ⎡ − + − = − = f C M S M bi E E q V 1 χ φ φ φ E vac qV bi E vac qV bi E C E V q χ q φ M q φ B q φ M φ M > φ S , n-type φ M < φ S , n-type...
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This note was uploaded on 08/09/2011 for the course EE 320 taught by Professor Zhongzhaohui during the Summer '11 term at Shanghai Jiao Tong University.

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13+Schottky+Diode - EECS 320 Metal-Semiconductor Junction...

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