9-Martin-MOMBE - MOMBE:Theoryand Applications WhatisMOMBE?

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    MOMBE: Theory and  Applications
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    What is MOMBE? Metal-Organic  Molecular Beam Epitaxy. Similar to Molecular Beam Epitaxy (MBE)  taught in lecture 1. A relatively new and growing field in  compound semiconductor manufacturing.
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    What is Epitaxy? The process of growing a new crystalline layer of  semiconductor/metal on top of a base crystalline  substrate or layer. Growth occurs by nucleation at very high  temperatures (~500˚C for some materials). The grown crystal mimics the structure of the base  crystal it is grown on. Grows in the Z-direction (gains thickness).
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    Metalorganic Molecules Metals undergo chemical reactions with “precursors”  to form compounds. These precursors are organic compounds with high  vapor pressures. The higher vapor pressures facilitate transport of  materials with inherently lower vapor pressures. Common molecules are Ga(CH 3 ) 3  and Ti(OC 3 H 7 ) 4
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    MOMBE Theory: Part 1 Uses epitaxy theory as well as “metal-organic” theory. A blank substrate is inserted into a vacuum chamber and heated.
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This note was uploaded on 08/23/2011 for the course ECE 3080 taught by Professor Staff during the Spring '08 term at Georgia Institute of Technology.

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9-Martin-MOMBE - MOMBE:Theoryand Applications WhatisMOMBE?

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